ULTRASMALL MEMS FTIR SPECTROMETER (MEMFIS)

Agreement no. 224151
Duration time: 1/08/2008-29/02/2012
Overall budget: EUR 4,426,560.00
EU contribution: EUR 2,850,000.00
Project coordinator: Technikon Forschungs- und Planungsgesellschaft mbH
Participants: Bruker Optik GmbH (Germany), CTR Carinthian Tech Research AG (Austria), Fraunhofer IPMS (Germany), KOC University (Turkey), RHE Microsystems (Germany), SOPRA (France), VIGO System S.A. (Poland), HiperScan GmbH (Germany)

MEMFIS plans to show the feasibility of a miniature spectroscopic chemical sensor system based on a micro-FT-IR spectrometer. Based on mid-infrared spectroscopy offering analyte selectivity unrivalled by any other method and paired with the inherent sensitivity of a FT-IR spectrometer, such devices could be used in a wide range of applications, from air monitoring over in-line real-time process control to security monitoring. The spectrometer utilises innovative optical components based on MEMS-technology, leading to very compact and rugged spectroscopic devices with ultra-rapid scanning capabilities.

The addition of a miniature source and a dedicated, highly sensitive detector completes the spectrometer module. Adding electronics and data evaluation and providing a standardised interface to various different modern IR probes, the MEMFIS spectrometer will present a very powerful spectroscopic sensor and a significant step forward in the smart spectroscopic sensors, microsystems technology and vibrational spectroscopy in general.